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AssigneeThe Fredericks Company
InventorsEmil Drubetsky, Donald R. Taylor, Jr.
Estimating the term…
A cold cathode ionization gauge includes a first and second electrode spaced apart and insulated from one another and having a common axis. A magnetic field generator surrounds the gauge and applies a non-time varying magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets adjacent each other. In one embodiment of the invention a non-magnetic annular spacer is placed between the opposed magnets. The magnet arrangement minimizes magnetic flux outside of the gauge while increasing the strength of the magnetic flux inside of the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
An ionization vacuum gauge apparatus comprising:
In a cold-cathode ionization gauge system for measuring the pressure in a chamber, the system including a vacuum enclosure defining a first electrode, the enclosure having an opening for communicating with the chamber whose pressure is to be measured, a second electrode spaced apart and insulated from the first electrode in the enclosure and having a common axis with the first electrode, a high voltage power source for supplying a high voltage between the electrodes, and means for measuring current collected at the first electrode caused by ions impinging thereupon, the current being a function of the pressure in the chamber, the system additionally including:
An ionization vacuum gauge apparatus comprising:
Dependencies are inferred from the claim text.