Electromechanical positioning device
OwnerStephan Kleindiekinventor
Life of this patent
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Abstract
An electromechanical positioning device to be used for positioning, for example, a probe-tip (12) in a scanning tunneling microscope, an electron emitter in a field electron gun, a mirror in an interferometer etc. comprises a low-mass support (10) as a moving drive means. The support, which is mounted to be frictionally movable in an electromechanical movement activating means, can be moved comparatively fast owing to its low mass and very precisely because its response to the movement force is controlled by sawtooth control pulses, preferably via a piezo-mechanical structure.
Claims12
An electromechanical positioning device for exactly placing a tip means (12), including the tip of a probe which is capable of producing an output, into a space of atomic order at the surface of a sample (20), said device comprising a piezo-tube (2) having electrodes (4,6) connected to variable voltages for the generation of movement actions of said tip means, wherein said tip means (12) is connected to a low-mass support means (10), said support means is frictionally mounted inside said piezo-tube to be movable along a friction surface in a direction perpendicular to the surface of the sample, and said piezo-tube comprises means for generating and transmitting electrically controllable movement actions to said support means (10) in response to said variable voltages.
Dependencies are inferred from the claim text.