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US 5,565,113 AGranted
Lithographically defined ejection units
AssigneeXerox Corporation
InventorsBabur B. Hadimioglu, Calvin F. Quate, Scott A. Elrod, Eric G. Rawson, Martin Lim
Life of this patent
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Abstract
A material deposition head having lithographically defined ejector units. Beneficially, each ejector unit includes a plurality of lithographically defined droplet ejectors. Furthermore, methods of fabricating such lithographically defined material deposition heads are also described.
Claims3
A method of fabricating a material deposition head comprised of the steps of:
- (a) lithographically defining the locations of a plurality of channels;
- (b) lithographically defining a plurality of apertures in each of the channels;
- (c) fabricating an aperture structure having a plurality of channels and a plurality of openings in each of the channels;
- and
- (d) attaching the fabricated aperture structure to a base containing a plurality of droplet ejectors such that a plurality of fluid chambers are formed by the base and the channels, and such that a plurality of droplet ejectors are within each of the fluid chambers and axially aligned with the apertures.
2 more elements
Dependencies are inferred from the claim text.