Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
AssigneeMartin Marietta Corporation
InventorsRobert J. Wojnarowski, Herbert S. Cole, John L. Henkes
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Abstract
HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing.
Claims12
A method for forming a fiber optic light guide, comprising the steps of:
- providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port;
- providing a body of a first polymer material, having a surface;
- mounting each of the first and second components in the first polymer body, near a predetermined ideal position and orientation;
- finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed;
- adaptively forming a groove in the body of the first polymer material through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation;
- forming a liner, within the adaptively-formed groove in said first polymer material, of a liner material having a relatively low index of refraction;
- and
- filling the groove and liner, between the first and second port sites, with a transparent second polymer material having a relatively high index of refraction.
A method for forming a fiber optic light guide, comprising the steps of:
- providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port;
- providing a substrate having a surface;
- mounting each of the first and second components on the substrate, near a predetermined ideal position and orientation;
- finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed;
- adaptively forming a groove into the substrate through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation;
- filling the groove with an uncured polymer material which shrinks upon curing and has an index of refraction greater than that of air;
- and
- allowing the polymer material within the groove to cure and to shrink to form a solid light-conducting structure smaller than the groove so as to form a gap between the solid light-conducting structure and the groove.
Dependencies are inferred from the claim text.