US 5,562,529 A · Apparatus and method for uniformly polishing a wafer

Abstract

An apparatus and method for polishing a semiconductor wafer. A polisher includes a supporting plate having a conductive film and a polishing cloth formed on the conductive film of the supporting plate. The polishing cloth has a plurality of openings to expose the conductive film. A wafer holder has a conductive wafer holding surface to hold a semiconductor wafer having current detective patterns and an insulating film covering the current detective patterns. A polishing slurry supply device supplies a polishing slurry including ions to either the polishing cloth or the semiconductor wafer. A current detecting device, connected to the supporting plate and the wafer holder, detects a magnitude of a current flowing across the supporting plate and the wafer holder through the conductive wafer holding surface, the semiconductor wafer held by the wafer holder, the current detective patterns of the semiconductor wafer, the polishing slurry filled in the openings of the polishing cloth, and the conductive film.

Claims6

Dependent claims

An apparatus for polishing a semiconductor wafer, comprising:

a polisher including a supporting plate having a conductive film and a polishing cloth formed on said conductive film of said supporting plate, said polishing cloth having a plurality of openings to expose said conductive film;
a wafer holder having a conductive wafer holding surface to hold a semiconductor wafer having current detective patterns and an insulating film covering said current detective patterns;
a polishing slurry supply means for supplying a polishing slurry including ions to either said polishing cloth or said semiconductor wafer;
and
a current detecting means, connected to said supporting plate and said wafer holder, for detecting a magnitude of a current flowing across said supporting plate and said wafer holder by way of said conductive wafer holding surface, said semiconductor wafer held by said wafer holder, said current detective patterns of said semiconductor wafer, said polishing slurry filled in said openings of said polishing cloth, and said conductive film.

2 more elements

A method for polishing a semiconductor wafer having current detective patterns and an insulating film covering said current detective patterns, comprising the steps of:

holding said semiconductor wafer on an electro-conductive wafer holding surface of a wafer holder;
turning at least one of said wafer holder and a polisher around a shaft perpendicular to said wafer holding surface, said polisher having a polishing cloth formed on an electro-conductive supporting plate, said polishing cloth having a plurality of openings to expose said electro-conductive supporting plate;
moving said semiconductor wafer held by said wafer holder and said polishing cloth on said electro-conductive supporting plate into contact with each other while supplying a polishing slurry including ions to polish said insulating film;
monitoring a magnitude of a current flowing across said electro-conductive supporting plate and said wafer holder through said polishing slurry filled in said openings of said polishing cloth, said current detective patterns, said semiconductor wafer, and said electro-conductive wafer holder surface, to detect a portion of said semiconductor wafer in which an amount of current does not flow;
and
increasing a pressure applied to said portion to further polish said portion compared with other portions of said semiconductor wafer.

3 more elements

Dependencies are inferred from the claim text.

Apparatus and method for uniformly polishing a wafer

Life of this patent

Apparatus and method for uniformly polishing a wafer

Life of this patent

Abstract

Claims6