US 5,559,336 AGranted

Integrated LPE-grown structure for simultaneous detection of infrared radiation in two bands

AssigneeSanta Barbara Research Center

InventorsKenneth Kosai, Jerry A. Wilson, Bonnie A. Baumgratz

Life of this patent

Estimating the term…

Loading patent…

Abstract

A radiation detector (1) unit cell (10) includes an n-p+ LWIR photodiode that is vertically integrated with a p+-n MWIR photodiode in a n-p+-n structure. Electrical contact is made separately to each of these layers in order to simultaneously detect both the LWIR and MWIR bands. The electrical contact is made via indium bump interconnections (23, 25, 27) enabling the unit cell to be subsequently hybridized with a topside mounted electronic readout integrated circuit (30). The n-p+-n structure in a given pixel of an array of radiation detector pixels is electrically isolated from all neighboring pixels by a trench (28) that is etched into an underlying substrate (12). To compensate for a reduction in the optically sensitive area due to the placement of the electrical contacts and the presence of the pixel isolation trench, a microlens (34) may be provided within, upon, or adjacent to the backside, radiation receiving surface of the substrate in registration with the unit cell.

Claims20

Dependent claims

A radiation detector unit cell that is responsive to electromagnetic radiation within two spectral bands, said radiation detector unit cell including a plurality of adjacently disposed layers of adjustable energy gap semiconductor material that are disposed upon a first surface of a transparent substrate, said substrate having a second surface opposite the first surface for admitting electromagnetic radiation to be detected, said detector unit cell comprising:

a first photodiode having an anode and a cathode, said first photodiode being responsive to electromagnetic radiation within a first spectral band for generating a detectable photocurrent in response thereto;
and
a second photodiode having an anode and a cathode, said second photodiode being responsive to electromagnetic radiation within a second spectral band for generating a detectable photocurrent in response thereto;
wherein
said first photodiode is electrically coupled in series with said second photodiode such that said anode of said first photodiode is coupled to said anode of said second photodiode;
said unit cell further comprising
a plurality of connection means individual ones of which are electrically coupled to said cathode of said first photodiode, to said cathode of said second photodiode, and to said anodes of said first and said second photodiodes;
a first mesa structure formed through a plurality of said adjacently disposed layers, a second mesa structure formed through a plurality of said adjacently disposed layers, and a third mesa structure formed through a plurality of said adjacently disposed layers, each of said mesa structures having a top surface that supports one of said plurality of connection means, and
a trench that surrounds said unit cell, said trench extending through said plurality of adjacently disposed layers and into said substrate.

6 more elements

A backside illuminated radiation detector unit cell comprising a substrate having a first surface and a plurality of layers disposed upon said first surface, said plurality of layers comprising:

a first layer disposed over said first surface of said substrate, said first layer being comprised of Group II-VI semiconductor material, said first layer having a first type of electrical conductivity and having a bandgap selected for absorbing radiation within a first spectral band;
a second layer overlying said first layer, said second layer being comprised of Group II-VI semiconductor material, said second layer having a second type of electrical conductivity that is opposite the first type of electrical conductivity and forming a diode junction with said first layer;
a third layer overlying said second layer, said third layer being comprised of Group II-VI semiconductor material, said third layer having the second type of electrical conductivity and having a bandgap selected for absorbing radiation within a second spectral band;
a fourth layer overlying said third layer, said fourth layer being comprised of Group II-VI semiconductor material, said fourth layer having the first type of electrical conductivity and forming a diode junction with said third layer;
a plurality of mesa structures each containing a portion of each of said plurality of layers;
and
an electrical contact disposed upon a top surface of each of said mesa structures for electrically contacting said first, said third, and said fourth layers.

4 more elements

A method of fabricating a radiation detector structure, comprising the steps of:

providing a substrate;
growing a first region comprised of Group II-VI semiconductor material upon a first surface of the substrate, the first region being doped to provide a first type of electrical conductivity and having a bandgap selected for absorbing radiation within a first spectral band;
growing a second region upon the first region, the second region being comprised of Group II-VI semiconductor material that is doped to provide a second type of electrical conductivity that is opposite the first type of electrical conductivity;
growing a third region upon the second region, the third region being comprised of Group II-VI semiconductor material that is doped to provide the second type of electrical conductivity, the third region having a bandgap selected for absorbing radiation within a second spectral band;
growing a fourth region upon the third region, the fourth region being comprised of Group II-VI semiconductor material that is doped to provide the first type of electrical conductivity;
differentiating the grown regions into a plurality of mesa structures each containing a portion of each of the plurality of regions;
and
forming an electrical contact upon a top surface of each of the mesa structures for electrically contacting the first, the third, and the fourth regions.

5 more elements

Dependencies are inferred from the claim text.