Flat panel display based on diamond thin films
AssigneeMicroelectronics and Computer Technology Corporation
InventorsNalin Kumar, Chenggang Xie
Life of this patent
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Abstract
A field emission cathode is provided which includes a substrate and a conductive layer disposed adjacent the substrate. An electrically resistive pillar is disposed adjacent the conductive layer, the resistive pillar having a substantially flat surface spaced from and substantially parallel to the substrate. A layer of diamond is disposed adjacent the flat surface of the resistive pillar.
Claims24
A method of making a field emission cathode, comprising the steps of:
- depositing a layer of conductive material over a substrate;
- depositioning an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;
- and
- depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer o cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate, wherein said cathode material has a negative electron affinity.
A method of making a field emission cathode, comprising the steps of:
- depositing a layer of conductive material over a substrate;
- depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;
- and
- depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate, wherein said conductive material layer is formed of chromium.
A method of making a field emission cathode, comprising the steps of:
- depositing a layer of conductive material over a substrate;
- depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;
- and
- depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate, wherein an intermediate metal layer is deposited over said resistive pillar prior to said step of depositing a layer of cathode material.
A method of making a field emission cathode, comprising the steps of:
- depositing a layer of conductive material over a substrate;
- depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;
- and
- depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate, wherein said cathode material is diamond film.
A method of making a field emission cathode, comprising the steps of:
- depositing a layer of conductive material over a substrate;
- depositing an electrically resistive pillar over said layer of conductive material, said electrically resistive pillar having a substantially flat surface spaced from and substantially parallel to said substrate;
- and
- depositing a layer of cathode material over said surface of said electrically resistive pillar, said layer of cathode material having a substantially flat exposed surface spaced from and substantially parallel to said substrate, wherein said cathode material is an alkali metal.
Dependencies are inferred from the claim text.