Fabry-Perot micro filter-detector

A tunable Fabry-Perot filter-detector comprising:

• a first wafer;
• a first mirror formed on said first wafer;
• a second wafer;
• a second mirror formed on said second wafer;
• at least one adjustable support connected to said first and second wafers;
• a third wafer;
• at least one detector formed on said third wafer;
• and
• a support barrier connected to said first and third wafer, in a manner that encloses said second wafer, and said first and second mirrors between said first and third wafers and within said support barrier.

A monolithic tunable cavity filter-detector comprising:

• a substrate;
• an array of microbolometer detectors formed on said substrate;
• a support wall formed on a perimeter of said substrate;
• a window wafer formed on said support wall;
• a first mirror formed on said window wafer;
• a bridge having ends attached to said window wafer;
• a second mirror formed on said bridge, said mirror proximate and approximately parallel to said first mirror, for forming a Fabry-Perot cavity;
• and
• at least one piezoelectric actuator formed on the ends of said bridge, for providing a piezoelectric actuated adjustment of a distance between said first and second mirrors so as to tune the Fabry-Perot cavity to a particular wavelength of light.