High-frequency induction heating coil
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsMasanori Kimura, Hirotoshi Yamagishi
Life of this patent
Estimating the term…
Abstract
A high-frequency induction heating coil is provided which enables a semiconductor single crystal in the process of growth to incorporate impurities uniformly therein, permits ready adjustment of the heat distributing property, and precludes the discharge of electricity across a slit. The high-frequency induction heating coil comprises a pair of annular conductors 21 and 22, a pair of power source terminals 23a and 23b for feeding a high-frequency electric current to the pair of annular conductors 21 and 22, and a plurality of small coils 24a through 24f and 25a through 25f having the pair of annular conductors as opposite electrodes and projecting toward the axis of the pair of annular conductors extending from a first annular conductor 21 to a second annular conductor 22.
Claims7
A high-frequency induction heating coil comprising;
- a pair of annular conductors;
- a pair of power source terminals for feeding a high-frequency electric current to said pair of annular conductors;
- a plurality of small coils each having one end electrically connected to one of said pair of annular conductors and another end connected to another of said pair of annular conductors and projecting toward an axis of the pair of annular conductors;
- and
- wherein one power source terminal is connected to only one annular conductor, and another power source terminal is connected to only another annular conductor.
Dependencies are inferred from the claim text.