Method of producing sheets of crystalline material and devices made therefrom
AssigneeMassachusetts Institute of Technology
InventorsCarl O. Bozler, John C. C. Fan, Robert W. McClelland
Life of this patent
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Abstract
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Claims11
A process for forming an essentially single crystal region of a semiconductor material comprising:
- forming a non-single crystal region on a composite structure having an insulating mask formed over a substrate, the mask having an upper surface defining a plane above the substrate and having an opening to expose a surface portion of a single crystal material positioned below the plane of the insulating mask upper surface such that said non-single crystal region contacts the single crystal material surface portion below the plane of the mask upper surface;
- heating the non-single crystal region with a first heater positioned below the substrate and second heater positioned above the non-single crystal region to initiate growth of the essentially single crystal region at the exposed surface portion of the single crystal material;
- and
- propagating the growth of the essentially single crystal region such that the single crystal region overlies at least a portion of the insulating mask.
A method of forming an essentially single crystal region of semiconductor material comprising:
- forming a substrate with a region of single crystal material exposed through an opening in an insulating layer that is positioned over the substrate such that the exposed region is positioned in a plane under the insulating layer;
- forming a non-single crystal region of semiconductor material over the insulating layer and in contact with the exposed single crystal region;
- heating the non-single crystal material with a first heater positioned below the substrate and a second heater above the semiconductor material to initiate growth of the essentially single crystal region at the exposed region of single crystal material;
- and
- propagating the growth of the essentially single crystal region such that the essentially single crystal region grows laterally over at least a portion of the insulating layer.
A process for forming an essentially single crystal region of semiconductor material comprising:
- forming a non-single crystal region over a substrate having an insulating layer formed over the substrate, the insulating layer exposing a single crystal material such that said non-single crystal region contacts the layer and the single crystal material in a plane underlying the insulating layer;
- providing a first heater below a substrate and a second heater above the non-single crystal region;
- heating the non-single crystal region with sufficient energy from the first heater and the second heater to initiate growth of an essentially single crystal region at the contact region between the non-single crystal region and the single crystal material;
- propagating the growth of the single crystal region such that the single crystal region overlies at least a portion of the insulating layer;
- and
- separating the single crystal region from the substrate.
Dependencies are inferred from the claim text.