Method and system for analyzing plasma data

A method for identifying gaseous species in a plasma, comprising:

• performing a plasma process, wherein a plasma comprising a plurality of gaseous species is created;
• obtaining data from said plasma process;
• inputting said data into a computer;
• indicating to said computer a gaseous specie to be assumed present in said plurality of gaseous species;
• automatically calibrating via said computer said data based on said indicated gaseous specie;
• and
• identifying at least one of said plurality of gaseous species.

A system for assisting an analyst with analyzing data derived from a plasma including a plurality of gaseous species, said system comprising:

• a computer;
• means for inputting said data into said computer;
• means for indicating to said computer a gaseous specie to be assumed present in said plurality of gaseous species;
• means for automatically calibrating said data based on said indicated gaseous specie;
• and
• means for automatically identifying at least one of said plurality of gaseous species.

A method for analyzing data derived from a plasma including a plurality of gaseous species, said data including wavelength data and at least one data peak, said method comprising:

• inputting said data into a computer;
• indicating to said computer one of a gaseous specie and a wavelength to be associated with said at least one data peak;
• automatically calibrating via said computer said data based on said indicated one of a gaseous specie and a wavelength;
• and
• identifying at least one of said plurality of gaseous species.