Articles having diamond-like protective thin film
AssigneeTDK Corporation
InventorsMasatoshi Nakayama, Masanori Shibahara
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Abstract
Articles protectively coated with a diamond-like thin film firmly bonded to the substrates are obtained by forming an intermediate layer composed of an amorphous mixture of silicon and carbon on a substrate of a material which has only a slight affinity for such a diamond-like thin film, and forming a diamond-like thin film further thereon.
Claims9
A protectively coated article which comprises a substrate of a material selected from the group consisting of alloys containing at least Co, Ni or Fe, ceramics, and glass and which has only a slight affinity for a diamond-like thin film, an intermediate layer consisting of an amorphous mixture of silicon and carbon and formed on the substrate and having a thickness of 0.02 to 3.0 .mu.m, and a diamond-like thin film consisting of amorphous carbon having a Raman's absorption at about 1,550 cm.sup.-1 but not having a sharp peak at 1,333 cm.sup.-1 formed further thereon.
Dependencies are inferred from the claim text.