Method of manufacturing a magnetic recording medium
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHideyuki Ueda, Kenji Kuwahara, Hiroshi Seki, Kiyoshi Takahashi, Masaru Odagiri, Mikio Murai, Yukikazu Ohchi
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Abstract
A magnetic recording media comprising a non-magnetic substrate, a ferromagnetic thin film on the non-magnetic substrate, a hard carbon film on the ferromagnetic thin film, a modified layer of which atomic ratio of nitrogen/carbon is 0.8% or more, and of which thickness is less than 3 nm on the hard carbon film, and a lubricant layer on the modified layer, has excellent electromagnetic conversion characteristic, running stability, durability, and weatherability.
Claims5
A manufacturing method of magnetic recording medium comprising the steps of forming a ferromagnetic thin film on a non-magnetic substrate, forming a hard carbon film on the ferromagnetic thin film, exposing the hard carbon film surface to glow discharge plasma by mixture gas of organic gas containing nitrogen and inorganic gas to form a modified layer, and forming a lubricant layer on the modified layer.
A manufacturing method of magnetic recording medium comprising the steps of forming a ferromagnetic thin film on a non-magnetic substrate, forming a hard carbon film on the ferromagnetic thin film, exposing the hard carbon film surface to glow discharge plasma by mixture gas of nitrogen involving organic gas, inorganic gas and hydrocarbon gas to form a modified layer, and forming a lubricant layer on the modified layer.
Dependencies are inferred from the claim text.