Optoelectric articles and a process for producing the same
AssigneeNGK Insulators, Ltd.
InventorsTsuguo Fukuda, Tatsuo Kawaguchi, Minoru Imaeda
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Abstract
According to the invention, a film of optoelectric single crystal may be formed on a substrate made of optoelectric single crystal by a liquid phase epitaxial process. The process comprises the steps of producing a melt of a solute and a melting medium, a solid phase and a liquid phase coexisting in the melt; then cooling the liquid phase for producing super cooling state in the liquid phase; and contacting the substrate to the liquid phase to form the film on the substrate by an epitaxial growing process. The film may be produced on the substrate, the film having a half value width of an X-ray rocking curve not more than that of the substrate.
Claims14
An optoelectric article comprising:
- a substrate comprised of an optoelectric single crystal;
- and
- an optoelectric single crystal film formed on said substrate by a liquid phrase epitaxial process, wherein a half value width of an X-ray rocking curve of said film is not more than that of said substrate.
A process for producing an optoelectric article comprising a substrate comprised of an optoelectric single crystal and an optoelectric single crystal film formed on said substrate by a liquid phase epitaxial process, said process comprising the steps of:
- producing a melt of a solute and a melting medium, a solid phase and a liquid phase coexisting in said melt;
- then cooling said liquid phase for producing a supercooled state in said liquid phase;
- and
- contacting said substrate to said liquid phase to form said film on said substrate by an epitaxial growing process.
Dependencies are inferred from the claim text.