Capacitive transducing with feedback
AssigneeGeneral Scanning, Inc.
InventorRoger D. Dowd
Life of this patent
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Abstract
A variable capacitance high precision, stable transducer for detecting position of a moving member including a first stationary conducting surface connected to a source, a second surface with at least two conducting, sensing regions and a third movable conductive surface located between the first surface and the second surface and connected to the moving member. The third surface is adapted to modulate charge transfered from the source surface before reaching the sensing regions. The difference of signals detected at the individual sensing regions is utilized to determine the position of the moving member and the sum of the signals is utilized to achieve appropriate correction in a feedback loop connected to the source.
Claims19
A variable capacitance transducer for detecting position of a moving member including:
- a first stationary conductive source surface, connected to a source of oscillating electrical energy;
- a second stationary surface, spaced apart from said first surface by a gap, comprising a plurality of electrically conductive sensing regions cooperatively arranged with said source surface;
- a third movable conductive surface, connected to said moving member, located between said first source surface and said plurality of sensing regions;
- said third conductive surface shaped and arranged to limit the amount of electrical energy transferred from said source surface to said plurality of sensing regions in direct dependence with a relative position of said third surface respective to said first and second surfaces;
- an electrical connecting circuit, connected to said sensing regions and said third surface, adapted to maintain said sensing regions and said third surface at substantially the same potential;
- an electrical measurement circuit, connected to each of said sensing regions, constructed and arranged to measure said relative position of said third surface based on the amount of energy simultaneously received by individual sensing regions;
- and
- an electrical control circuit, connected to said electrical measurement circuit and said source in a feedback arrangement, constructed to control the amount of energy said source applies to said source surface based on the amount of energy received by said sensing regions.
A variable capacitor transducer apparatus comprising:
- a first stationary conductive surface, in a dielectric fluid or a vacuum, connected to a source of oscillating voltage;
- a second stationary surface spaced away from said first surface by a constant gap and divided into a plurality of pairs of electrically conductive regions, each one said region of said pairs connected to a first electrical output terminal, and each other said region of said pairs connected to a second output terminal;
- a third conductive surface, interposed between said first surface and said second surface, connected to said moving member and adapted to move in translation or rotation, said third conductive surface being shaped in a manner that its movement in one direction causes an increase of the area of said regions connected to said first terminal that said first surface exposes without obstruction by said third surface, and said motion causes a symmetrical decrease of the area of said regions connected to said second terminal that said first surface exposes without obstruction by said third surface;
- a first electrical means for maintaining said regions of said second surface and said third surface at substantially the same potential;
- a second electrical means, connected to said terminals, for measuring a position of said third surface based on the amplitude of the difference of the oscillating charge flowing through the said first and second output terminals;
- a third electrical means, connected to said terminals, for measuring the amplitude of the sum of the oscillating charge flowing through the said first and second output terminals;
- and
- a fourth electrical means, connected to said third means and said source, for controlling said source of oscillation voltage in a manner that the said amplitude of the sum of oscillating charge flow remains constant.
Dependencies are inferred from the claim text.