Miniaturized mass filter
AssigneeNorthrop Grumman Corporation
InventorsCarl B. Freidhoff, Robert M. Young
Life of this patent
Estimating the term…
Abstract
A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
Claims13
A mass filter for use in a solid state mass spectrograph for analyzing a sample of gas, said mass filter being located in a mass filter section of a cavity provided in a semiconductor substrate, said mass filter generating an electromagnetic field in said cavity, said mass filter filtering by mass/charge ratio an ionized portion of said sample of gas generated by a gas ionizer, said mass filter including means for evacuating said mass filter.
Dependencies are inferred from the claim text.