Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby

A method of fabricating a switch, comprising the steps of:

• providing an insulating layer over a plurality of metal plates, said insulating layer having a plurality of vias, each one of said plurality of vias extending to a predetermined respective one of said metal plates;
• providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into at least a respective one of said plurality of vias and contacts a selected one of said plurality of metal plates;
• providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one of said plurality of vias, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer;
• providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening;
• and
• removing said sacrificial layer.