Chemical mechanical polishing slurry for metal layers
AssigneeCabot Corporation
InventorsMatthew Neville, David J. Fluck, Cheng-Hung Hung, Michael A. Lucarelli, Debra L. Scherber
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Abstract
A slurry for use in chemical-mechanical polishing of a metal layer comprising high purity fine metal oxide particles uniformly dispersed in a stable aqueous medium.
Claims39
A method for chemical-mechanical polishing a metal layer of a substrate, the method which comprises the steps of:
- a) providing a chemical mechanical polishing slurry comprising high purity, alumina particles uniformly dispersed in an aqueous medium having a surface area ranging from about 40 m.sup.2 /g to about 430 m.sup.2 /g, an aggregate size distribution less than about 1.0 micron, a mean aggregate diameter less than about 0.4 micron and a force sufficient to repel and overcome the van der Waals forces between the particles, wherein said slurry is stable;
- and
- b) chemical mechanical polishing a metal layer on a semiconductor substrate with said slurry.
A chemical-mechanical polishing slurry for polishing a metal layer comprising:
- high purity, alumina particles uniformly dispersed in an aqueous medium having a surface area ranging from about 40 m.sup.2 /g to about 430 m.sup.2 /g, an aggregate size distribution less than about 1.0 micron, a mean aggregate diameter less than about 0.4 micron and a force sufficient to repel and overcome the van der Waals forces between the particles, wherein said slurry is colloidally stable.
A chemical-mechanical polishing slurry for polishing a metal layer comprising high purity, alumina particles uniformly dispersed in an aqueous medium having a surface area ranging from about 40 m.sup.2 /g to about 430 m.sup.2 /g, an aggregate size distribution less than about 1.0 micron, a mean aggregate diameter less than about 0.4 micron and a force sufficient to repel and overcome the van der Waals forces between the particles and an oxidizing component, wherein said slurry is colloidally stable.
Dependencies are inferred from the claim text.