Device and method for cleaning a filter
AssigneeLeybold Aktiengesellschaft
InventorWolfgang Schwarz
Life of this patent
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Abstract
The invention relates to a device and a method for cleaning a filter (7) disposed between a chamber contaminated with particles and a pump station. Herein a feedline (21) for oxygen or for an oxygen/inert gas mixture to the filter (7) is provided which is equipped with an arrangement (11) influencing the flow of gas. Moreover, the device has a drainage (20) for gaseous reaction products and, if necessary, inert gas from the filter (7), which is provided with an arrangement (15) influencing the throughflow of this gas.
Claims18
Device for cleaning a filter disposed between a chamber contaminated by particles and a pump station, comprising:
- a supply (21) for oxygen or an oxygen/inert gas mixture;
- a filter (6, 7) coupled to the supply, the supply (21) having valve means (11) coupled to the filter for influencing the gas throughflow;
- a drainage (20) coupled to the filter for gaseous reaction products and any inert gas from the filter (6, 7);
- the drainage having valve means (15) for influencing the throughflow of these gases.
Method for cleaning a filter which is disposed between a dust supply (9) and a cleaning drainage (18, 19) wherein drawing of dust to the filter (6, 7) is carried out by means of a pump station (17), comprising:
- a) closing the dust supply (9) as well as also the pure gas drainage (18, 19) after a filter process;
- b) impressing the filter (6, 7) by inert gas for the purposes of cleaning;
- c) with the dust supply (9) closed and the pure gas drainage (18, 19) closed, terminating the inert gas supply and supplying oxygen to the filter (6, 7);
- and
- d) suctioning the gaseous oxidation products and the inert gas as well as the unconsumed oxygen residue from the filter (6, 7).
Method for cleaning a filter contaminated with metal dust, comprising the following steps:
- a) bringing metal dust from a metal containing device (1) via first valve means (8) to a filter (7) where said metal dust is deposited;
- b) closing said first valve means (8) and opening second valve means (11);
- c) bringing oxygen or oxygen mixture via said second valve means (11) to said filter (7), thereby oxidizing said metal dust on said filter (7);
- d) removing said oxidized metal dust from said filter (7) by mechanically vibrating said filter (7).
Dependencies are inferred from the claim text.