US 5,525,806 A · Focused charged beam apparatus, and its processing and observation method

Abstract

To process sample of specific portion or position for the transmission electron microscope [TEM] simply to the most suitable or optimal shape, and to confirm the sample thickness of the sample while processing above (on-going confirmation). To make TEM sample through etching by way of irradiation of ion beam 2 onto sample 4, and to confirm processing status of sample by way of irradiating electron beam 7 from horizontal angle to cross-section of sample, and of detecting secondary electron, reflection electron, X ray, and transmission electron with respective detector 5, 9, 10, and 11, and to estimate the thickness of sample in process above since the intensities of these signals above changes due to the thin film thickness of sample.

Claims6

Dependent claims

A focused charged beam apparatus comprising:

a sample stage for holding a sample at a sample location;
a focused ion-beam optics system for forming a focused ion beam, directing the focused ion beam along an ion beam axis, scanning a surface of the sample with the focused ion beam, and irradiating a predetermined area of the surface of the sample with the focused ion beam;
a focused electron beam irradiation system for forming a focused electron beam, directing the focused electron beam along an electron beam axis which is perpendicular to the ion beam axis, and scanning and irradiating a surface of the sample with the focused electron beam;
and
a transmission electron detector disposed for detecting electrons of the focused electron beam which are transmitted through the sample at the sample location, said transmission electron detector being located so that the sample at the sample location is interposed between the focused electron beam which irradiates the sample and said transmission electron detector.

2 more elements

Dependencies are inferred from the claim text.

Focused charged beam apparatus, and its processing and observation method

Life of this patent

Focused charged beam apparatus, and its processing and observation method

Life of this patent

Abstract

Claims6