Self-assembled monolayer coating for micro-mechanical devices
AssigneeTexas Instruments Incorporated
InventorsRobert M. Wallace, Douglas A. Webb, Bruce E. Gnade
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Abstract
A method of forming of a monomolecular coating (19) for surfaces of contacting elements (11, 17) of micro-mechanical devices (10), specifically, devices that have moving elements that contact other elements and that tend to stick as a result of the contact. The method uses liquid deposition, with the device being placed in a solution that contains a precursor to the formation of the coating. The precursor is chosen based on coordination chemistry between the precursor and the surface to be coated.
Claims8
An improved micro-mechanical device of a type having relatively moving elements, portions of which may come into contact with each other and thereafter adhere together at their contacting surfaces, wherein the improvement comprises:
- a self-assembled monomolecular layer on at least one of said contacting surfaces, said layer having been formed from a precursor solution that contains a precursor substance;
- wherein said contacting surfaces are comprised of a material selected from the group consisting of metal and aluminum oxide;
- and
- wherein said precursor solution contains a precursor substance selected from the group consisting of:
- hydrocarbon, fluorocarbon, n-alkanoic acid, alkyl oxalic acid, hydroxamic acid, and phosphonic acid.
A method of preventing sticking of contacting elements of a micro-mechanical device, comprising the steps of:
- at least partially fabricating said micro-mechanical device, such that at least one of said contacting elements is substantially fabricated from materials selected from the group consisting of metal and aluminum oxide;
- immersing at least the surface of said at least one contacting element in a precursor solution containing a precursor substance, such that molecules of said precursor substance bind to said surface as a self-assembled monolayer;
- wherein said precursor solution contains a precursor substance selected from the group consisting of:
- hydrocarbon, fluorocarbon, n-alkanoic acid, alkyl oxalic acid, and hydroxamic acid.
A digital micro-mirror device, comprising:
- a substrate upon which the following elements are fabricated:
- at least one landing electrode, a support post, a hinge extending from said support post, a mass attached to said hinge, wherein said hinge is deformable so as to permit said mass to contact said landing electrode upon being subjected to an applied force;
- and
- wherein the contacting surface of said mass or of said landing electrode, or both of said contacting surfaces, are coated with a self-assembled monomolecular layer;
- and
- wherein said self-assembled monomolecular layer is made from an n-alkanoic precursor.
Dependencies are inferred from the claim text.