Probe card apparatus
OwnerH. Dan Higginsinventor
Life of this patent
Estimating the term…
Abstract
Probe card apparatus includes a base element having a central cutout portion and an insert block is disposed in the cut out portion. A probe card secured to the base element includes a plurality of needle elements which contact electrical elements on an integrated circuit chip on a wafer being tested. The base element and probe card are secured to a printed circuit board. The insert contacts the needle elements and biases them against the electrical elements being tested. The insert block is positionable relative to the base element and to the needle elements, and the base element is positionable relative to the printed circuit board.
Claims25
Probe card apparatus securable to a printed circuit board for testing integrated circuits on a wafer, comprising, in combination:
- base element means, including
- a base element securable to the printed circuit board, and
- a first cutout portion having a stepped configuration in the base element;
- probe card means secured to the base element means and including
- a substrate,
- a second cutout portion aligned with the first cutout portion of the base element means,
- a plurality of conductive elements secured to the substrate, and
- a plurality of needle elements extending from the conductive elements and extending into the second cutout portion for contacting the integrated circuits on the wafer for testing purposes;
- and
- insert means having a stepped configuration to conform to the stepped configuration of the first cutout portion disposed in the first cutout portion in the base element means for contacting the needle elements of the probe card means to bias the needle elements against the integrated circuits for testing, including
- a third cutout portion aligned with the second cutout portion for allowing the visual alignment of the needle elements and the integrated circuits for testing, and
- fulcrum means for contacting the needle elements for biasing the needle elements against the integrated circuits for testing.
Probe card apparatus for testing integrated circuits, comprising, in combination:
- base element means, including
- a base element, and
- a first cutout portion having a stepped configuration extending through the base element;
- probe card means secured to the base element means, including
- a membrane,
- a second cutout portion in the membrane aligned with the first cutout portion in the base element, and
- a plurality of conductive elements on the membrane and extending into the second cutout portion for contacting the integrated circuits for testing;
- and
- insert means conforming to the stepped configuration of the first cutout portion disposed in the first cutout portion and adjustable therein for contacting the conductive elements to bias the conductive elements against the integrated circuits for testing.
Dependencies are inferred from the claim text.