Liquid vaporizing apparatus
AssigneesMitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
InventorsTooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Abstract
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
Claims8
A liquid vaporizing apparatus comprising:
- a container for holding a liquid to be vaporized;
- a bubbling tube inserted into said container for vaporizing the liquid by blowing a gas into the liquid;
- a gas ejection pipe for ejecting blown gas and vaporized liquid outside of said container;
- a liquid-supply pipe for supplying the liquid into said container;
- first temperature-detection means for detecting the temperature of the liquid in said container;
- first temperature-adjustment means responsive to said first temperature-detection means for maintaining the liquid in said container at a predetermined temperature;
- second temperature-detection means for detecting the temperature of an internal space in said container above the liquid in said container;
- and
- second temperature-adjustment means for controlling the temperature of the internal space in said container and using the temperature detected by said second temperature-detecting means to control the temperature of the internal space in said container to be the same as the temperature of the liquid in said container.
A liquid vaporizing apparatus comprising:
- a container for holding a liquid to be vaporized;
- a bubbling tube inserted into said container for vaporizing the liquid by blowing a gas into the liquid;
- a gas ejection pipe for ejecting blown gas and vaporized liquid outside of said container;
- a liquid-supply pipe for supplying the liquid into said container;
- first temperature-detection means for detecting the temperature of the liquid in said container;
- first temperature-adjustment means responsive to said first temperature-detection means for maintaining the liquid in said container at a predetermined temperature;
- a cover disposed in an upper portion of said container covering an internal space in said container and having therein a closed space surrounding portions of said bubbling tube, said gas ejection pipe, said liquid supply pipe, and said first temperature-detection means that extend outside of said container;
- second temperature-detection means for detecting the temperature of the closed space in said cover;
- and
- second temperature-adjustment means provided for said cover and using the temperature detected by said second temperature-detecting means to control the temperature of the closed space in said cover to be the same as the temperature of the liquid in said container.
Dependencies are inferred from the claim text.