Low-gas temperature stabilization system
AssigneeBrooks Automation, Inc.
InventorRichard S. Muka
Life of this patent
Estimating the term…
Abstract
The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.
Claims2
Apparatus for stabilizing the temperature of an object in a vacuum region, comprising in combination:
- a chamber having a controlled-temperature member and means for supporting said object so that said object is spaced from said member by a small gap,
- means for evacuating the chamber including means for evacuating the chamber to a pressure just sufficient to provide viscous gas behavior, means for maintaining said pressure until the temperature of the object has been adjusted to match that of said member by gas conduction heat transfer across said small gap, and means for further evacuating the chamber to the desired vacuum.
Apparatus for treating of an object in a vacuum region at a specified temperature, said vacuum region having a specified vacuum, comprising in combination:
- a chamber having a controlled-temperature member and means for supporting said object so that said object is spaced from said member by a small gap,
- means for evacuating the chamber including means for evacuating the chamber to a pressure just sufficient to provide viscous gas behavior, means for maintaining said pressure until the temperature of the object has been adjusted to match that of said member by gas conduction heat transfer across said small gap, and means for further evacuating the chamber to the specified vacuum, and
- means for transfering the object to the vacuum region.
Dependencies are inferred from the claim text.