Chuck assembly
AssigneeXerox Corporation
InventorsEugene A. Swain, Geoffrey M. T. Foley
Life of this patent
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Abstract
There is disclosed a chuck assembly for engaging the inner surface of a hollow substrate comprising: (a) a fluid impermeable elastic membrane including a substrate engaging portion, wherein the inner surface of the membrane defines an interior space; and (b) a plurality of radially movable members at least partially disposed in the interior space, wherein the membrane is dimensioned to provide a radially inward force on the members, wherein the members in a radially expanded position push the substrate engaging portion of the membrane against the substrate inner surface, and wherein the peripheral dimension of the elastic membrane decreases when the members are in a radially contracted position.
Claims12
A chuck assembly for engaging an inner surface of a hollow substrate comprising:
- (a) a fluid impermeable elastic membrane including a substrate engaging portion, wherein an inner surface of the membrane defines an interior space, and wherein the membrane is adapted to form a hermetic seal when engaged with the substrate inner surface;
- and
- (b) a plurality of radially movable members at least partially disposed in the interior space, wherein the membrane is dimensioned to provide a radially inward force on the members, wherein the members in a radially expanded position push the substrate engaging portion of the membrane against the substrate inner surface, and wherein the peripheral dimension of the elastic membrane decreases when the members are in a radially contracted position, and wherein engagement of the membrane against the substrate inner surface results in the hermetic seal which minimizes fluid migration into the substrate interior.
A chuck assembly for engaging an inner surface of a hollow substrate comprising:
- (a) a fluid impermeable elastic membrane including a substrate engaging portion, wherein an inner surface of the membrane defines an interior space, and wherein the membrane is adapted to form a hermetic seal when engaged with the substrate inner surface;
- and
- (b) a plurality of circumferentially arranged and radially movable members at least partially disposed in the interior space, wherein adjoining members overlap and contact one another in an overlapping area, wherein the membrane is dimensioned to provide a radially inward force on the members, wherein the members in a radially expanded position push the substrate engaging portion of the membrane against the substrate inner surface, and wherein the peripheral dimension of the elastic membrane decreases when the members are in a radially contracted position, and wherein engagement of the membrane against the substrate inner surface results in the hermetic seal which minimizes fluid migration into the substrate interior.
Dependencies are inferred from the claim text.