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US 5,518,624 AGranted
Ultra pure water filtration
AssigneeIllinois Water Treatment Company
InventorsJames L. Filson, Wesley R. Carrera, Ramesh R. Bhave
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AssigneeIllinois Water Treatment Company
InventorsJames L. Filson, Wesley R. Carrera, Ramesh R. Bhave
Estimating the term…
Ceramic filtration of a feed solution of ultra pure water and particle contaminants is disclosed through a metal oxide membrane on ceramic support. In one aspect, the filtering of ultra pure water from a feed solution containing ultra pure water and contaminant particles includes passing the feed solution cross-flow through a multi-channel sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water. The sintered metal oxide membrane has a nominal pore size in the range of about 50 to 200 Angstroms. Although high recoveries per pass rates were used, no detectable aluminum ions were found in the ultra pure water. In another aspect, the apparatus and process of the present invention for filtering ultra pure water includes cross-flow filtration using multichannel monolithic ceramic membranes at suitable pore sizes in a total chemical process system including ozonation sterilization of the ceramic membrane particle filter in water purification applications for electronics manufacturing.
A process for separating particle contaminants from ultra pure water in a feed solution containing ultra pure water and particle contaminants comprising passing a feed of corrosive, high purity water by cross-flow filtration through a sintered monolithic metal oxide membrane on ceramic support to form a permeate of ultra pure water wherein said metal oxide membrane has a nominal pore size greater than about 50 Angstroms and less than about 500 Angstroms.
A process for filtering ultra pure water, comprising passing a feed of ultra pure water consisting essentially of corrosive, high purity water and further containing organic macromolecule particles cross-flow through a sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water, wherein said metal oxide membrane has a nominal pore size of about 50 to 200 Angstroms.
A process of removing particles from water, comprising:
Dependencies are inferred from the claim text.