Clean room system
AssigneeMeissner & Wurst GmbH & Co. Lufttechnisch Anlagen Gebaude- und Verfahrenstechnik
InventorsManfred Renz, Rudolf Simon, Ulrich Eser
Life of this patent
Estimating the term…
Abstract
A clean room system has at least one clean room through which clean air is guided. The clean room has a bottom through which the clean air exits. At least one blower for sucking the clean air from the clean room through the bottom is provided. The blower is in the form of an axial blower operating at low pressure. At least one inlet channel for introducing the clean air leaving the blower into the clean room is provided. Filter units are positioned at the ceiling of the clean room for filtering the clean air before entering the clean room.
Claims48
A clean room system comprising:
- at least one clean room through which clean air is guided;
- said clean room having a bottom through which the clean air exits;
- at least one blower for sucking the clean air from the clean room through said bottom;
- at least one inlet channel for introducing the clean air leaving said blower into said clean room;
- filter units positioned at the ceiling of the clean room for filtering the clean air before entering said clean room;
- at least one first muffler device positioned upstream of said blower, said first muffler device comprised of first parallel, spaced apart plates, wherein said first parallel, spaced apart plates are spaced at different distances from one another, wherein each one of said first parallel, spaced apart plates has a different length in a direction of flow of the clean air, and wherein a shortest one of said first parallel, spaced apart plates has the smallest distance to a neighboring one of said first parallel, spaced apart plates.
A clean room system comprising:
- at least one clean room through which clean air is guided;
- said clean room having a bottom through which the clean air exits;
- at least one blower for sucking the clean air from the clean room through said bottom;
- at least one inlet channel for introducing the clean air leaving said blower into said clean room;
- filter units positioned at the ceiling of the clean room for filtering the clean air before entering said clean room;
- at least one muffler device positioned downstream of said blower, said muffler device comprised of parallel, spaced apart plates, wherein said parallel, spaced apart plates are spaced at different distances from one another, wherein each one of said parallel, spaced apart plates has a different length in a direction of flow of the clean air, and wherein a shortest one of said parallel, spaced apart plates has the smallest distance to a neighboring one of said parallel, spaced apart plates.
Dependencies are inferred from the claim text.