Fabrication processes for monolithic electronic modules
AssigneeInternational Business Machines Corporation
InventorsKenneth E. Beilstein, Jr., Claude L. Bertin, Wayne J. Howell
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorsKenneth E. Beilstein, Jr., Claude L. Bertin, Wayne J. Howell
Estimating the term…
This invention comprises various high production methods for simultaneously forming surface metallizations on a plurality of monolithic electronic modules. Each monolithic electronic module may comprise a single semiconductor chip or multiple semiconductor chips. The methods can employ a workpiece which automatically discontinues side surface metallization between different electronic modules in the stack. Multiple workpieces are interleaved within the stack between the electronic modules. Each workpiece may include a transfer layer(s) for permanent bonding to an end surface of an adjacent electronic module in the stack. This transfer layer may comprise an insulation layer, a metallization layer, an active circuit layer, or any combination thereof. End surface metallization can thus be provided contemporaneous with side surface metallization of multiple electronic modules.
A process for metallizing a selected side surface of each electronic module of multiple electronic modules, said metallizing process comprising the steps of:
A process for applying a transfer layer to a planar main surface of a semiconductor chip, said process comprising the steps of:
A process for metallizing a side surface of a semiconductor chip, said process comprising the steps of:
A process for metallizing a selected side surface and an end surface of an electronic module, said process comprising the steps of:
Dependencies are inferred from the claim text.