Interferometric measuring apparatus employing fixed non-zero path length difference
AssigneeRenishaw PLC
InventorDavid R. McMurtry
Life of this patent
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AssigneeRenishaw PLC
InventorDavid R. McMurtry
Estimating the term…
A combined interferometer and refractometer includes two interferometers each of which uses a light beam produced from a common source which are split into measuring component beams and reference component beams. The measuring component beams are directed along parallel paths to an object and are reflected back from reflecting surfaces on the object which is so positioned as to produce a fixed path length difference between the beams. The reflected beams are re-combined with the reference component beams to produce output beams which pass to a detector system which derives an output signal from each. Changes in refractive index are determined from any difference in the two output signals, and the distance moved by the object is determined from any change in either one of the output signals or by summing them and dividing by two. Methods are described whereby the measurements of refractive index or of distance can be made absolute.
Interferometric measuring apparatus for measuring movements of an object in a fluid medium, the apparatus comprising:
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