CMOS output buffer with enhanced ESD resistance
AssigneeVLSI Technology, Inc.
InventorTiao-Yuan Huang
Life of this patent
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Abstract
The present invention provides a CMOS integrated circuit in which core transistors are provided with punch-through pockets, while the input/output transistors are not provided with punch-through pockets. Punch-through protection for the input/output transistors by virtue of their larger dimensions. The pockets, like lightly doped drains, are formed after the gates are formed but before the formation of gate sidewalls. However, the input/output are masked during the punch-through implants, but are unmasked for at least one of the lightly doped drain implants. The absence of pockets on the input/output transistors enhances their ESD resistance, and thus the ESD resistance of the incorporating integrated circuit.
Claims5
An integrated circuit structure comprising:
- a core NMOS transistor, said core NMOS transistor having
- an n-type core NMOS source,
- an n-type core NMOS drain,
- a core NMOS gate,
- a core NMOS gate oxide, and
- a core NMOS channel region below said core NMOS gate, said core NMOS channel region including
- a core n-channel adjacent said core NMOS gate oxide and extending between said core NMOS source and said core NMOS drain,
- a p-type punch-through dopant formation disposed below said channel and between said core NMOS source and said core NMOS drain;
- a core PMOS transistor, said core PMOS transistor having
- a p-type core PMOS source,
- a p-type core PMOS drain,
- a core PMOS gate,
- a core PMOS gate oxide, and
- a core PMOS channel region below said core PMOS gate, said core PMOS channel region including
- a core p-channel adjacent said core NMOS gate oxide and extending between said core PMOS source and said core PMOS drain,
- an n-type punch-through dopant formation disposed below said channel and between said core PMOS source and said core PMOS drain;
- an output NMOS transistor, said output NMOS transistor having
- an n-type output NMOS source,
- an n-type output NMOS drain,
- an output NMOS gate,
- an output NMOS gate oxide, and
- an output NMOS channel region including an output n-channel and not including a punch-through dopant formation, the length of said, output NMOS channel region being greater than the length of said core NMOS channel region;
- and
- an output PMOS transistor, said output PMOS transistor having
- a p-type output PMOS source,
- a p-type output PMOS drain,
- an output PMOS gate,
- an output PMOS gate oxide, and
- an output PMOS channel region including an output p-channel and not including a punch-through dopant formation, the length of said output PMOS channel region being greater than the length of said core PMOS channel region, said output PMOS gate being electrically coupled to said output NMOS gate, said core NMOS drain, and said core PMOS drain.
Dependencies are inferred from the claim text.