Apparatus for improved image resolution in electron microscopy
AssigneeGatan, Inc.
InventorsOndrej L. Krivanek, Paul E. Mooney, Daniel N. Bui
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Abstract
An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.
Claims22
An apparatus for improving the resolution of images produced by an electron microscope comprising:
- an electron beam forming an electron image;
- a support structure mounted in the path of said electron beam, said support structure transmitting said electron image;
- scintillating material on the side of said support structure opposite that on which said electron image is incident, said scintillating material converting said electron image into a light image;
- means for deflecting the optical path of said light image;
- and
- a device positioned to receive and record said light image.
An apparatus for improving the resolution of images produced by an electron microscope comprising:
- an electron beam forming an electron image;
- a support structure mounted in the path of the electron beam, the support structure transmitting the electron image;
- scintillating material on the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image;
- a mirror positioned directly in the path of the electron beam to deflect the light image away from the direction of the electron beam;
- a lens optical coupling positioned to receive the deflected light image;
- and
- a charge-coupled camera positioned along a focal plane of the lens optical coupling to receive and record the light image.
Dependencies are inferred from the claim text.