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US 5,516,418 AGranted
Patterned electroplating
AssigneeInternational Business Machines Corporation
InventorsSaad K. Doss, Dennis R. McKean, Alfred F. Renaldo, Robert J. Wilson
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Abstract
A process for patterned electroplating involves the steps of: (i) coating a substrate with a layer of hydroxyquinoline which acts as an adhesion promoter; (ii) coating the adhesion layer with a radiation sensitive polymeric resist; (iii) imagewise exposing the film to radiation; (iv) developing the image to patternwise expose the substrate; (v) electroplating metal onto the exposed portions of the substrate; and (vi) removing the remaining polymeric film from the substrate.
Claims7
A process for forming a thin film magnetic head comprising:
- (i) forming a layer of hydroxyquinoline on a metallized substrate;
- (ii) coating the layer with a radiation sensitive polymeric film;
- (iii) patternwise exposing the polymeric film to radiation;
- (iv) developing the film to patternwise expose the substrate;
- (v) electroplating metal onto the exposed portions of the substrate;
- and
- (vi) removing remaining polymeric film from the substrate to form the magnetic head.
4 more elements
Dependencies are inferred from the claim text.