SOI methods and apparatus

A charge coupled device having a low operating capacitance comprising a monocrystalline semiconductor substrate, a dielectric layer atop said substrate, a thin monocrystalline semiconductor layer spitaxially monolithic with said monocrystalline substrate at a plurality of window zones through said dielectric layer, atop said dielectric layer, said thin monocrystalline semiconductor layer having a thickness in the range of from about 0.25 to about 5 microns, and having a defined thin semiconductor charge conduction channel, input and output structures in said channel, and charge transfer electrodes atop said channel between said input and output structures.