US 5,514,883 A · Field effect transistor · patentgrep

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Abstract

A field effect transistor is disclosed. The field effect transistor includes: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on the upper face of the semiconductor substrate, the semiconductor layered structure including a channel layer; a source electric formed on the semiconductor layered structure; a drain electrode formed on the semiconductor layered structure at a position apart from the source electrode in a first direction by a prescribed distance; and a gate electrode, formed on the semiconductor layered structure between the source electrode and the drain electrode. The channel layer includes: a first channel region positioned directly under the source electrode; a second channel region positioned directly under the drain electrode; a third channel region which is adjacent to the first channel region and which is not positioned directly under the gate electrode; a fourth channel region which is adjacent to the second channel region and which is not positioned directly under the gate electrode; and a plurality of stripe-like middle channel regions for connecting the third channel region to the fourth channel region.

Claims15

Dependent claims

A field effect transistor comprising:

a semiconductor substrate having at least an upper face;
a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer;
a source electrode formed on said semiconductor layered structure;
a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance;
and
a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode,
wherein said channel layer includes:
a first channel region positioned directly under the whole of said source electrode;
a second channel region positioned directly under the whole of said drain electrode;
a third channel region which is adjacent to all of a side of said first channel region and which is not positioned directly under any one of said gate electrode, said source electrode, and said drain electrode;
a fourth channel region which is adjacent to all of a side of said second channel region and which is not positioned directly under any one of said gate electrode, said source electrode, and said drain electrode;
and
a plurality of stripe-like middle channel regions for connecting said third channel region to said fourth channel region.

10 more elements

A field effect transistor comprising:

a semiconductor substrate having at least an upper face;
a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer;
a source electrode formed on said semiconductor layered structure;
a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance;
and
a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode,
wherein said channel layer includes:
a first channel region connected to said source electrode;
a second channel region connected to said drain electrode;
and
a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region,
wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses,
wherein said plurality of recesses are positioned between said first channel region and said second channel region, and
wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and
wherein said semiconductor layered structure includes a p-type semiconductor layer formed under said channel layer, said channel layer is made of an n-type semiconductor to form a depletion layer therein by the contact of said channel layer with said p-type semiconductor layer, and said channel layer being an uppermost layer of said semiconductor layered structure to form another depletion layer therein by the contact of said channel layer with said gate electrode.

12 more elements

A field effect transistor comprising:

a semiconductor substrate having at least an upper face;
a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer;
a source electrode formed on said semiconductor layered structure;
a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance;
and
a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode,
wherein said channel layer includes:
a first channel region connected to said source electrode;
a second channel region connected to said drain electrode;
and
a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region,
wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses,
wherein said plurality of recesses are positioned between said first channel region and said second channel region, and
wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and
wherein said semiconductor layered structure includes:
a first semiconductor layer containing n-type impurities at a first concentration;
a channel layer formed on said first semiconductor layer and containing the n-type impurities at a second concentration which is lower than said first concentration, said channel layer having a smaller bandgap than that of said first semiconductor layer;
and
a second semiconductor layer, formed on said channel layer, containing the n-type impurities at a concentration higher than said second concentration said second semiconductor layer having a larger bandgap than that of said channel layer.

16 more elements

A field effect transistor comprising:

a semiconductor substrate having at least an upper face;
a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer;
a source electrode formed on said semiconductor layered structure;
a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance:
and
a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode,
wherein said channel layer includes:
a first channel region connected to said source electrode;
a second channel region connected to said drain electrode;
and
a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region,
wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses,
wherein said plurality of recesses are positioned between said first channel region and said second channel region, and
wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions,
wherein said semiconductor layered structure includes:
a first semiconductor layer to which n-type impurities are added at a high concentration;
a channel layer, formed on said first semiconductor layer, to which the n-type impurities are added at a concentration lower than that of said first semiconductor layer, said channel layer having a smaller bandgap than that of said first semiconductor layer;
and
a second semiconductor layer, formed of said channel layer, to which the n-type impurities are added at a concentration higher than that of said channel layer, said second semiconductor layer having a larger bandgap than that of said channel layer, and
wherein said stripe-like ridges each have grooves at side faces thereof, said grooves being formed by removing part of said channel layer.

17 more elements

A field effect transistor comprising:

a semiconductor substrate having at least an upper face;
a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer and an electron supplying layer formed on said channel layer, said channel layer substantially containing no impurity;
a source electrode formed on said semiconductor layered structure;
a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance;
and
a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode,
wherein said channel layer includes:
a first channel region connected to said source electrode;
a second channel region connected to said drain electrode;
and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region,
wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, said plurality of recesses are positioned between said first channel region and said second channel region, and each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and
wherein said gate electrode includes:
a plurality of gate electrode portions formed to cover top faces of said plurality of stripe-like ridges, respectively;
and an interconnection formed on said plurality of gate electrode portions and over said plurality of recesses.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/370,211Filed 6 Jan 1995 · continuation
Priority: JP 4-07206230 Mar 1992
Granted: 7 May 1996
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10D 62/221
Channel regions of field-effect devices: of FETs
B82Y 10/00
Nanotechnology for information processing, storage or transmission
H10D 30/014
Manufacture or treatment: of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron…
H10D 30/4732
Having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT: using Group III-V semiconductor material

Family

Serial39,933Parent of this continuation · filed 29 Mar 1993
US 5,514,883 AThis patent

From the US filing history. Foreign family members aren’t listed.

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