Gap light emitting device having a low carbon content in the substrate
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsMunehisa Yanagisawa, Susumu Higuchi, Yu K. Tamura, Akio Nakamura, Toshio Otaki
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Abstract
A semiconductor substrate for GaP type light emitting devices which includes an n-type single crystal substrate, an n-type GaP layer, and a p-type GaP layer formed on the n-type GaP single crystal substrate. The carbon concentration in the n-type GaP single crystal substrate is more than 1.0.times.10.sup.16 atoms/cc, but less than 1.0.times.10.sup.17 atoms/cc. The n-type GaP single crystal substrate is obtained from an n-type GaP single crystal grown by the Liquid Encapsulation Czochralski method wherein B.sub.2 O.sub.3 containing water corresponding to 200 ppm or more is used as an encapsulation liquid.
Claims4
A semiconductor substrate for GaP type light emitting devices comprising:
- an n-type GaP single crystal substrate;
- an n-type GaP layer formed on said n-type GaP single crystal substrate;
- and
- a p-type GaP layer formed on said n-type GaP layer,
- wherein carbon concentration in said n-type GaP single crystal substrate is more than 1.0 .times.10.sup.16 atoms/cc but less than 1.0.times.10.sup.17 atoms/cc.
Dependencies are inferred from the claim text.