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US 5,514,822 AGranted
Precursors and processes for making metal oxides
AssigneeSymetrix Corporation
InventorsMichael C. Scott, Carlos A. Paz de Araujo, Larry D. McMillan
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AssigneeSymetrix Corporation
InventorsMichael C. Scott, Carlos A. Paz de Araujo, Larry D. McMillan
Estimating the term…
A first metal, an alcohol, and a carboxylic acid are reacted to form a metal alkoxycarboxylate which is then reacted with an alkoxide and/or a carboxylate of a second metal to form a precursor. Alternatively, a metal carboxylate and a metal alkoxide are combined and heated to form a precursor. In either alternative, the precursor includes all or most of the metal-oxygen-metal bonds of a desired metal oxide and a carboxylate ligand. The precursor is applied to a substrate, dried and annealed to form the metal oxide, such as BST. The metal-oxygen-metal bonds in the precursor permit the desired metal oxide to be formed from the precursor in one step, providing excellent thin films suitable for integrated circuits. The carboxylate ligand provides stability to the precursor allowing it to be stored for periods common in large scale manufacturing.
A liquid precursor for use in making a solid metal oxide, said precursor comprising:
A precursor for use in making a solid metal oxide, comprising;
A method of making a precursor for fabricating a metal oxide, said method comprising the steps of:
A precursor produced according to a method comprising the steps of:
A method of making a barium strontium titanate precursor, said method comprising the steps of:
A method of making a strontium bismuth tantalate precursor, said method comprising the steps of:
Dependencies are inferred from the claim text.