Light receiving member having a multi-layered light receiving layer with an enhanced concentration of hydrogen or/and halogen atoms in the vicinity of the interface of adjacent layers

A light receiving member comprising a substrate and a light receiving layer disposed on said substrate, said light receiving layer having a stacked structure comprising a plurality of constituent layers being stacked on said substrate, each of said plurality of constituent layers being composed of a non-single crystal material containing silicon atoms as a matrix and at least one kind of atom selected from the group consisting of hydrogen atoms and halogen atoms, characterized in that at least one layer of adjacent layers of said plurality of constituent layers has a 100 to 10,000.ANG. thick interface neighborhood region in the vicinity of the interface between said adjacent layers, said interface neighborhood region containing said at least one kind of atom selected from hydrogen atoms and halogen atoms at a concentration which is greater than the concentration of said at least one kind of atom selected from hydrogen atoms and halogen atoms contained in said one layer excluding said interface neighborhood region.