System and method of cooling apparatus
AssigneeTakasago Netsugaku Kogyo Kabushiki Kaisha
InventorTadahiro Ohmi
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Abstract
This invention intends to provide an apparatus-cooling system high in cooling efficiency and easy in maintenance as well as a method to cool an apparatus. The invention is characterized in that an apparatus-cooling water system comprising at least a water tank (1) for storing pure water, pipings (3), (5) for outwardly introducing pure water from the water tank and returning the water to the tank, respectively, and pump (2) for passing pure water through the pipings is provided with an ozonator (6) for supplying ozone into the pure water.
Claims9
A system for cooling an apparatus comprising:
- a water tank containing a purified water having a specific resistance of at least 1M.OMEGA..cm, and from which calcium carbonate and silica components have been removed,
- pipings for outwardly introducing said purified water from said water tank to the apparatus to be cooled and returning said purified water from the cooled apparatus to said water tank,
- pump means for circulating said purified water through said pipings, and
- means for supplying ozone into said purified water.
A method of cooling an apparatus which comprises:
- storing a purified water having a specific resistance of at least 1M.OMEGA..cm, and from which calcium carbonate and silica components have been removed;
- supplying ozone into said purified water;
- introducing the ozone-containing purified water to the apparatus to be cooled so as to collect heat therefrom;
- withdrawing a heated purified water from the apparatus;
- passing the withdrawn water through a heat exchanger so as to obtain a cooled water;
- and
- returning the cooled water to the storing tank.
Dependencies are inferred from the claim text.