Micromachined conveyor devices

Abstract

Various forms of micromachined electrostatic microconveyors and useful devices based thereon are described. In one embodiment, a tube shaped conveyor is formed by disposing conductors circumferentially about the exterior surface of the tube. The tube is formed of an insulating material (e.g., silicon dioxide). Driving voltages are applied in staggered phase to selected ones of the conductors to provide a travelling electrostatic wave within the tube. Charged particles (or fluid or gas) can be propelled through the tube electrostatically by "riding" the travelling wave. Various aspects of the invention are directed to apparatus making use of the microconveyor to convey particles, gas ions, etc.. Apparatus is described for using gas pressure resulting from the transport of gas ions to do mechanical work (i.e., to operate mechanical actuators. A planar microconveyor, similar to the tubular microconveyor, but formed as a series of evenly spaced conductive lines on the surface of a semiconductor die is also described. Other aspect of the invention are directed to using the microconveyors in conjunction with an electrostatic accelerator to "sort" or select particles by directing them through specific apertures into associated bins or reservoirs.

Dependencies are inferred from the claim text.