Universal specimen prealigner
AssigneeKensington Laboratories, Inc.
InventorsPaul E. Bacchi, Paul S. Filipski
Life of this patent
Estimating the term…
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AssigneeKensington Laboratories, Inc.
InventorsPaul E. Bacchi, Paul S. Filipski
Estimating the term…
A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. The rotary stage is mounted on the X-Y stage and receives a semiconductor wafer (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan a peripheral edge (76) of the wafer across an optical scanning assembly (36, 270) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122, 280) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.
A specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge that includes a sharp contour transition, the preselected alignment including a selected position and a selected orientation, comprising:
In conjunction with a specimen prealigner for positioning in a preselected alignment a specimen having a peripheral edge that includes a sharp contour transition, a specimen prealigning method comprising:
Dependencies are inferred from the claim text.