US 5,513,593 AGranted

Liquid-phase heteroepitaxy method

AssigneeMax-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.

InventorsPer-Ove Hansson, Martin Albrecht

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Abstract

To produce a layer by liquid-phase heteroepitaxy a molten metal serving as the solvent is saturated at a first temperature with substrate material and compounded with layer material. The solution and the substrate are then separatly "overheated" to a second, higher temperature and then brought into contact with each other. Due to the overheating a negative thermodynamic driving force results for the epitaxy which compensates the positive driving force for the epitaxy at least in part due to the different interfacial energies between layer material and solution and substrate material and solution. The degree of overheating determines the resulting total driving force for the epitaxy which may be reduced to zero. Very thin layers, down to a monolayer thickness may be grown in this way from the solution with a layer thickness exact to a monolayer with no dislocation.

Claims3

Dependent claims

A liquid-phase heteroepitaxy method for depositing a layer of a layer material on a surface of an object composed of a substrate material, comprising the steps of:

(a) preparing a solution by saturating a solvent with the substrate material at a first temperature and compounding the saturated solvent with the layer material;
(b) heating, separately, the solution prepared according to step (a) and the surface of the object to a second temperature;
and
(c) bringing the heated surface of the object into contact with the heated solution to effect the deposition of layer material on the surface of the object at the second temperature;
wherein
(i) the composition of the substrate material is different from the composition of the layer material;
(ii) the first temperature is higher than the melting point of the solvent but lower than the melting point of the layer material;
(iii) the second temperature is higher than the first temperature but is lower than the melting temperature of the substrate material and is also lower than or equal to the melting temperature of the layer material;
and
(iv) at the second temperature, the surface energy of the solution is less than the surface energy of the layer material and the surface energy of the layer material is less than or equal to the surface energy of the substrate material.

7 more elements

Dependencies are inferred from the claim text.