Antireflective film and optical elements having the same
AssigneeNikon Corporation
InventorJun Abe
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Abstract
An antireflective film, comprising a film composed of an inorganic chemical compound consisting of Mg, Si, O and F and a film composed of an inorganic chemical compound consisting of Zr, Si and O. The film shows antireflective property over a wide spectral range even with a limited number of layers. An optical element comprising a transparent body is provided with, a film formed thereon, composed of an inorganic chemical compound consisting of Zr, Si and O and a film formed as an outermost layer facing the air, composed of an inorganic chemical compound consisting of Mg, Si, O and F.
Claims14
An antireflective film comprising:
- a film composed of an inorganic chemical compound comprising Mg, Si, O and F;
- and
- a film composed of an inorganic chemical compound comprising Zr, Si and O.
An optical element comprising:
- a transparent body;
- a film formed thereon, composed of an inorganic chemical compound comprising Zr, Si and O;
- and
- a film formed as an outermost layer facing the air, composed of an inorganic chemical compound comprising Mg, Si, O and F.
An antireflective film comprising:
- a first film composed of an inorganic chemical compound comprising Mg, Si, O and F;
- and
- a second film composed of an inorganic chemical compound comprising Zr, Si and O wherein said first and second films are formed by sputtering performed in plasma.
An antireflective film comprising:
- a first film composed of an inorganic chemical compound comprising Mg, Si, O and F;
- and
- a second film composed of an inorganic chemical compound comprising Zr, Si and O wherein said first and second films are formed by sputtering performed in a plasma, utilizing Ar gas and gas flow is controlled to be 16:1.
Dependencies are inferred from the claim text.