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OwnerKimitsugu Saito, Koichi Miyata +4inventors
InventorsKimitsugu Saito, Koichi Miyata, John P. Bade, Jr., Brian R. Stoner, Jesko A. von Windheim, Scott R. Sahaida
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The highly-oriented diamond film thermistor has a temperature sensing part formed of a highly-oriented diamond film grown by chemical vapor deposition. This highly-oriented diamond film satisfies the conditions that at least 65% of the film surface area is covered by (100) or (111) planes of diamond and the differences {.DELTA..alpha., .DELTA..beta., .DELTA..gamma.} of Euler angles {.alpha., .beta., .gamma.}, which represent the orientations of the crystal planes, simultaneously satisfy conditions, .vertline..DELTA..alpha..vertline..ltoreq.5.degree., .vertline..DELTA..beta..vertline..ltoreq.5.degree., .vertline..DELTA..gamma..vertline..ltoreq.5.degree., between adjacent crystal planes.
A highly-oriented diamond film thermistor comprising a temperature sensing part formed of a highly-oriented diamond film grown by chemical vapor deposition, in which at least 65% of the surface area of said diamond film surface consists of (100) crystal planes, and the differences {.DELTA..alpha., .DELTA..beta., .DELTA..gamma.} of Euler angles {.alpha., .beta., .gamma.} which represent the orientations of the crystal plane, simultaneously satisfy .vertline..DELTA..alpha..vertline..ltoreq.10.degree., .vertline..DELTA..beta..vertline..ltoreq.10.degree., and .vertline..DELTA..gamma..vertline..ltoreq.10.degree. between adjacent (100) crystal planes.
A highly-oriented diamond film thermistor comprising a temperature sensing part formed of a highly-oriented diamond film grown by chemical vapor deposition, in which at least 65% of the surface area of said diamond film surface consists of (111) crystal planes, and the differences {.DELTA..alpha., .DELTA..beta., .DELTA..gamma.} of Euler angles {.alpha., .beta., .gamma.}, which represent the orientations of the crystal planes, simultaneously satisfy .vertline..DELTA..alpha..vertline..ltoreq.10.degree., .vertline..DELTA..beta..vertline..ltoreq.10.degree., and .vertline..DELTA..gamma..vertline..ltoreq.10.degree. between adjacent (111) crystal planes.
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