Permanent magnet arrangement for use in magnetron plasma processing
AssigneeShin-Etsu Chemical Co., Ltd.
InventorKen Ohashi
Life of this patent
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Abstract
A permanent magnet arrangement for magnetron plasma processing is disclosed. The arrangement includes a plurality of permanent magnets each of which has a fan-shaped or equilateral cross section parallel to the major surfaces thereof. The permanent magnets are assembled to form the permanent magnet arrangement which takes a disk-like configuration or a polygon. Each of the plural permanent magnets is made of rare-earth material and radially or essentially radially magnetized.
Claims14
A permanent magnet arrangement for magnetron plasma processing, comprising:
- a plurality of permanent magnets each of which has a sector-shaped cross section parallel to major surfaces thereof, said sector-shaped cross section including a single vertex, said plurality of permanent magnets being assembled to form said permanent magnet arrangement which has a disk-like configuration, each of said plurality of permanent magnets being made of a rare-earth material and radially magnetized.
A permanent magnet arrangement for magnetron plasma processing, comprising:
- a plurality of permanent magnets each of which has a sector-shaped cross section parallel to major surfaces thereof, said sector-shaped cross section including a single vertex, said plurality of permanent magnets being assembled to form said permanent magnet arrangement which has a disc-like configuration, each of said plurality of permanent magnets being made of a rare-earth material and magnetized in a direction parallel to a line originating from a midpoint of a circular arc to a vertex of said permanent magnet.
A permanent magnet arrangement for magnetron plasma processing, comprising:
- a plurality of permanent magnets each of which has an equilateral triangular cross section parallel to major surfaces thereof, said plurality of permanent magnets being assembled to form said permanent magnet arrangement which has the form of a polygon, each of said plurality of permanent magnets being made of a rare-earth material and magnetized in a direction parallel to a line extending from a line extending from a midpoint of a base of said magnet to a vertex thereof.
Dependencies are inferred from the claim text.