Solid-state micro proximity sensor
OwnerZhenhai Chen, Ren C. Luoinventors
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Abstract
A solid-state fringe effect capacitive proximity sensor is described which lends itself to use for surface mounting and other space constrained applications. The sensor comprises an insulating substrate having a plurality of sensing electrodes formed thereon and without any screen elements therebetween. The electrodes are adapted to measure the proximity distance of a target object (conductive or non-conductive) by means of the fringe capacitance effect created between the electrodes. Capacitance measurement processing circuitry is electrically connected to the plurality of sensory electrodes.
Claims23
A solid-state fringe effect micro capacitive proximity sensor, said proximity sensor comprising:
- an insulating substrate;
- a plurality of sensing electrodes formed on said insulating substrate in closely spaced relationship and without any screen element therebetween, said electrodes adapted to measure the proximity distance of a target object by means of the fringe capacitance effects created between said electrodes and wherein the distance range between said electrodes is 1 micrometer to electrode width;
- and
- capacitance measurement processing circuitry electrically connected to said plurality of sensing electrodes.
A solid-state fringe effect micro capacitive proximity sensor, said proximity sensor comprising:
- a substrate;
- capacitance measurement processing circuitry formed on said substrate so as to become an integral part of said proximity sensor;
- an insulating layer deposited on the combination of processing circuitry and substrate;
- and
- a plurality of sensing electrodes formed on said insulating layer in closely spaced relationship and without any screen element therebetween, said electrodes being electrically connected to said processing circuitry and adapted to measure the proximity distance of a target object by means of the fringe capacitance effects created between said electrodes and wherein the distance range between said electrodes is 1 micrometer to electrode width.
Dependencies are inferred from the claim text.