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US 5,512,152 AGranted
Process for preparation of stabilized oxide thin layers
AssigneeSaint-Gobain Vitrage
InventorsHeinz Schicht, Herbert Schindler, Klaus Januschkewitz, Werner Gregorowius, Wilfried Kaiser
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Abstract
A method for improving the quality of a system of layers deposited on a substrate such as glass is provided, in which, the system of layers have an oxide-based surface layer, in particular n-type semi-conductor oxides such as SnO.sub.x, in which the surface layer is subjected to IR irradiation to provide a stabilization of the layer equivalent to or better than with a 48-hour exposure to the air.
Claims10
A process for preparing a stabilized layer-coated substrate, which comprises:
- a) depositing a metallic oxide surface layer onto a surface of a substrate by vacuum deposition;
- and
- b) irradiating said metallic oxide surface layer with infrared radiation, wherein said irradiation is effected using a wavelength and for a duration sufficient to impart an intensity of 1 kW/m.sup.2 to 90 kW/m.sup.2 thereto, and wherein said substrate is maintained at a temperature which does not exceed about 100.degree. C.
Dependencies are inferred from the claim text.