Cleaning apparatus
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorYasukazu Mukogawa
Life of this patent
Estimating the term…
Abstract
An improved cleaning apparatus preventing new cleaning chemicals form contamination at the time of exchanging used cleaning chemicals with the new chemicals is provided. The apparatus includes a cleaning chemicals tank storing new chemicals and a cleaning vessel. A first cleaning chemicals supply conduit supplying new chemicals from tank into vessel is coupled to cleaning chemicals tank. A waste fluid conduit externally discharging used cleaning chemicals is provided at the bottom of vessel. Vessel is provided with wetting agent supply means supplying a wetting agent to wet the inner wall surface 8a of vessel.
Claims12
A cleaning apparatus for cleaning a semiconductor wafer by immersing the semiconductor wafer in cleaning chemicals contained in a cleaning container, comprising:
- a cleaning container being made of teflon-based materials, for accommodating the cleaning chemicals;
- a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals;
- and
- wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container.
A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising:
- a cleaning container for accommodating the cleaning chemicals;
- a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals;
- wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container;
- a buffer tank connected to said conduit;
- count means connected to said conduit, downstream of the buffer tank, for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid;
- and
- control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means.
A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising:
- a cleaning container for accommodating the cleaning chemicals;
- a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals;
- wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container;
- count means connected to said conduit for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid;
- control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means;
- and
- bubble removal means provided between said conduit for waste fluid and said count means for removing bubbles in the fluid flowing in said conduit for waste fluid.
A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals including a cleaning vessel for accommodating cleaning chemicals supplied from a cleaning chemicals tank,
- said cleaning vessel including,
- (a) a bottom wall member,
- (b) a first tubular surrounding member provided on said bottom wall member for forming an accommodation chamber for accommodating said cleaning chemicals
- (c) a second tubular surrounding member provided on said bottom wall member and surrounding said first tubular surrounding member from the outside at a distance apart so as to form a first space, and
- (d) a third tubular surrounding member provided on said bottom wall member and surrounding said second tubular surrounding member from the outside at a distance apart so as to form a second space,
- (e) the height of said second tubular surrounding member being larger than the height of said first tubular surrounding member,
- said apparatus further including,
- a first cleaning chemicals supply conduit for supplying the cleaning chemicals into said accommodation chamber,
- a second cleaning chemicals supply conduit for supplying the cleaning chemicals to said first space up from the bottom,
- a first conduit for waste fluid provided at said bottom wall member for discharging the cleaning chemicals present in said accommodation chamber, and
- a second conduit for waste fluid connected to said bottom wall member for discharging the cleaning chemicals present in said second space.
Dependencies are inferred from the claim text.