Making polymer thin films for optical uses
OwnerDenice D. Denton, Jeffrey A. Tobininventors
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Abstract
A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.
Claims2
A thin film optical wave guide comprising a plasma polymerized film of organic monomer deposited as a film on a substrate, the film having an index of refraction which varies through the film in relation to distance from the substrate and which varies to a peak in the interior of the film so as to tend to retain and guide a light beam transmitted into the interior thereof.
Dependencies are inferred from the claim text.