# US 5,510,629 A · Multilayer antifuse with intermediate spacer layer

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- Number: US 5,510,629 A
- Document ID: US5510629A
- Status: Granted
- Kind: A
- Application number: 08/250,068
- Filed: 1994-05-27
- Granted: 1996-04-23
- Earliest claimed: 1994-05-27
- Assignees: Crosspoint Solutions, Inc.
- Inventors: Yakov Karpovich; Ali A. Iranmanesh
- Web page: https://patentgrep.com/patent/US5510629A

## CPC

- H10W 20/065: {by making at least a portion of the conductive part non-conductive, e.g. by oxidation}
- H10W 20/491: {Antifuses, i.e. interconnections changeable from non-conductive to conductive}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A method and structure for an improved antifuse in an integrated circuit having a sacrificial layer under a programming layer which forces a conductive link upon programming to be formed away from corner regions of the via structures. The method includes the unique step of forming an improved aperture or via with sides through an inter dielectric layer where the antifuse is to be located. The improved aperture or via exposes a portion of a metal interconnection line through a portion of sacrificial layer located away from the inter dielectric layer sides. Such improved method of forming the antifuse also provides a superior antifuse structure.

## Claims

### Claim 1

An antifuse structure having a first insulating layer on a semiconductor substrate in an integrated circuit comprising:
a first metal interconnection line;
a sacrificial layer formed on said first metal interconnection line, said sacrificial layer having a first thickness;
a second insulating layer formed on said sacrificial layer;
an aperture having a bottom and sides through said second insulating layer, said bottom being concave and having sloped edge portions and a relatively flat center portion wherein said antifuse is to be located, said sloped edge portions defining sacrificial layer edge portions located between said sides and said relatively flat center portion, and said relatively flat center portion defining a first metal interconnection line portion located between said sloped edge portions;
a programming layer on said second insulating layer, said sides, and said bottom, said programming layer having a second thickness that is substantially uniform along said bottom, and said programming layer and said sacrificial layer being of different materials; and
a second metal interconnection line on said programming layer; and
whereby a thickness of said programming layer at said relatively flat center portion is much thinner than a combined thickness of said programming layer and said sacrificial layer at said sloped edge portions.

### Claim 2 (depends on 1)

The antifuse structure of claim 1 wherein said first thickness is about 350 .ANG..

### Claim 3 (depends on 1)

The antifuse structure of claim 1 wherein said sacrificial layer is selected from the group consisting of amorphous silicon, undoped polysilicon, silicon dioxide, and silicon nitride.

### Claim 4 (depends on 1)

The antifuse structure of claim 1 wherein said programming layer is selected from the group consisting of amorphous silicon, undoped polysilicon, silicon dioxide, and silicon nitride.

### Claim 5 (depends on 1)

The antifuse structure of claim 1 wherein said second metal interconnection line comprises a refractory metal layer.

### Claim 6 (depends on 1)

The antifuse structure of claim 1 wherein said first thickness of said sacrificial layer is between about 100 and 500 .ANG..

### Claim 7 (depends on 1)

The antifuse structure of claim 1 wherein said thickness of said programming layer is between about 600 and 1200 .ANG..

### Claim 8 (depends on 1)

The antifuse structure of claim 1 wherein said insulating layer is selected from the group consisting of undoped silicate glass, borophosphosilicate glass (BPSG), and phosphosilicate glass (PSG).

### Claim 9 (depends on 1)

The antifuse structure of claim 1 wherein said insulating layer has a thickness from about 5,000 to 10,000 .ANG..

### Claim 10 (depends on 1)

The antifuse structure of claim 1 wherein said programming layer comprises amorphous silicon with an atomic hydrogen content from 10-20% by composition.

### Claim 11 (depends on 1)

The antifuse structure of claim 1 wherein each of said first and said second metal interconnection lines comprises a refractory metal layer.

### Claim 12 (depends on 11)

The antifuse structure of claim 11 wherein said refractory metal layer comprises titanium-tungsten.

### Claim 13 (depends on 11)

The antifuse structure of claim 11 wherein said first metal interconnection line comprises a thin etch stop layer on said refractory metal layer.

### Claim 14 (depends on 13)

The antifuse structure of claim 13 wherein said thin etch stop layer comprises aluminum.

### Claim 15 (depends on 14)

The antifuse structure of claim 14 wherein said etch stop layer is about 200 to 400 .ANG. thick.

### Claim 16 (depends on 1)

The antifuse structure of claim 1 wherein said first metal interconnection line comprises a refractory metal layer.

### Claim 17 (depends on 16)

The antifuse structure of claim 16 wherein said refractory metal layer comprises titanium-tungsten.

### Claim 18 (depends on 16)

The antifuse structure of claim 16 wherein said first metal interconnection line comprises a thin etch stop layer on said refractory metal layer.

### Claim 19 (depends on 18)

The antifuse structure of claim 18 wherein said etch stop layer comprises aluminum.

### Claim 20 (depends on 19)

The antifuse structure of claim 19 wherein said etch stop layer is about 200 to 400 .ANG. thick.