Simultaneous specimen and stage cleaning device for analytical electron microscope
AssigneeThe University of Chicago
InventorNestor J. Zaluzec
Life of this patent
Estimating the term…
Abstract
An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.
Claims16
Apparatus for cleaning a specimen stage and specimen for viewing in an analytical electron microscope (AEM) comprising:
- plasma chamber means for containing a gas plasma;
- and
- air lock means coupled to said plasma chamber means for permitting passage of the specimen stage and specimen into the plasma chamber means and for maintaining an airtight chamber.
A method for cleaning a specimen stage and specimen for viewing in an analytical electron microscope (AEM) comprising the steps of:
- providing a plasma chamber with an airlock for permitting passage of the specimen stage and specimen into the plasma chamber means and for maintaining an airtight chamber;
- inserting the specimen stage and specimen into the plasma chamber and cleaning the specimen stage and specimen utilizing a gas plasma.
Dependencies are inferred from the claim text.